Since the first IC product appeared in the world in 1958, the IC industry has developed very rapidly. Especially in the past 20 years, a new product has appeared every 2-3 years, and the product has developed from small-scale IC to the present. Very large scale IC. With the rapid development of ultra-large scale integrated circuit technology, the line width of integrated circuits has reached a stage of only a few microns, which requires higher and higher reliability, and the harm of static electricity to IC has become more and more significant. The harm caused to us is amazing.
So what kind of major harm will static electricity cause to our integrated circuit industry? There are three main aspects.
First, ESA. ElectroStaticAttraction electrostatic adsorption, it will cause serious pollution.
We know that the IC production process requires a clean workshop or an ultra-clean workshop. However, few domestic manufacturers can achieve that there is no particle in the clean room. It is now required to reduce the particle size of the dust particles from the original 0.3μm to the current 0.1μm, but if the particle size of the adsorbed dust particles is greater than the line width , It is easy to scrap the product.
Sometimes customers will ask, the whole process of producing wafers has done a good job of electrostatic protection. The grounding is connected, the antistatic supplies to be used are also used, and the purification level is also very high. Why is it left for a period of time Will it suck up later? That's because the machines or workshops that produce and process wafers are equipped with FFU high-efficiency filters. When the airflow rubs against the product, static electricity will be generated. When static electricity accumulates to a certain amount, it will attract dust. Therefore, we recommend installing a static eliminator without an air source at the lower end of the high-efficiency filter to ensure the dynamic balance of the entire space.
Second, ESD. ElectroStaticDischarge Electrostatic discharge, it will cause device breakdown.
Electrostatic discharge is a process of charge accumulation. When a charge accumulates to a certain degree, a conductor close to it will generate an electrostatic discharge. To give a very simple example, in dry winter, people can easily accumulate static electricity after walking and rubbing. When we touch a metal handle or open a car door, we will get an electric shock. This is electrostatic discharge. The general human body has 3000 When there is static electricity of -5000V, there will be obvious discharge feeling.
The same is true for semiconductor components. If a semiconductor device with a certain amount of static electricity is placed alone or incorporated into a circuit module, it will be broken down immediately. After the device is affected by electrostatic discharge, there may be no immediate functional damage, but it will affect the reliability of the components.
The losses caused by electrostatic discharge can reach more than several billion dollars annually. Therefore, many large-scale component and equipment manufacturers introduce professional technology to reduce the accumulation of static electricity in the production environment.
Third, EMI. ElectroMagneticInterference electronic interference, it will cause damage.
Electrostatic discharge will radiate a lot of radio waves, and these radio waves are frequency, which will cause great interference to the surrounding microprocessors, such as chaotic program instructions, chaotic data, unknown error messages, etc. And these problems are generally not taken seriously, but once the failure occurs, the harm it brings will be huge.
The losses caused by the above hazards are amazing. According to relevant reports, it is estimated that the direct economic loss caused by static electricity in China's electronics industry is as high as billions of RMB each year; the direct economic loss caused by static electricity in the United States reaches more than 10 billion US dollars each year; the United Kingdom has also lost nearly 2 billion pounds; In the 1990s in Japan, 45% of substandard microelectronic devices were caused by static electricity. These figures are very shocking. Adding these global losses together, it should be possible to build dozens of chip manufacturers like Huahong NEC, which will bring us all benefits.
After understanding the harm caused by static electricity, we will think of how to protect it. At present, the main protection means is grounding, anti-static floor should be laid on the floor of the workshop, anti-static table mat should be laid on the workbench, people should wear anti-static coats, and anti-static containers and packaging bags should be used during turnover and transportation. When these protective measures are completed, can all problems be solved? My answer is "no". Because insulation materials such as Teflon, quartz, polymer synthetic carbide, glass, cartoon, epoxy resin, etc. must be used in the workshop, and these materials cannot be grounded; high-efficiency filters will generate airflow, and the air cannot be grounded. Therefore, a device must be used to eliminate static electricity. This kind of equipment is called a static eliminator. It uses a neutralization method to eliminate static electricity. Most of the devices currently on the market are cutting-edge discharge static eliminators.
What is a tip discharge static eliminator? It is composed of a high-voltage power generator and a discharge electrode, which ionizes the air into a large number of positive and negative ions through the high-voltage corona discharge at the tip to neutralize the static electricity on the surface of the object.
When the surface of the object is positively charged, the negative ions emitted by the static eliminator will neutralize it. When the surface of the object is negatively charged, the positive ions emitted by the static eliminator will neutralize it.
Speaking of this, customers often have some doubts. For example, when the static electricity on the product is eliminated by the static eliminator, the static eliminator is still emitting positive and negative ions. Will the product be re-charged with static electricity at this time? the answer is negative. The static eliminator is a process to reduce the accumulation of static electricity on the surface of the object. When the surface of the object is no longer static, part of the positive and negative ions emitted by the static eliminator will neutralize itself, and part of it will attract the opposite ions from other places.
So there are many static eliminators on the market, how do we choose the one that suits us?
According to the style, there are fan-type ion fans, dust-type ion air guns, wind nozzles, wind snakes, ion rods with and without air sources. How to choose depends on the production process and the characteristics of the occasion To decide. For example, in the machine with FFU high-efficiency filter, you need to use a bar-type static eliminator without a wind source. You can choose a desktop or hanging static eliminator on the workbench according to the static elimination range. If you need to remove dust, you can choose an air gun , Wind mouth or wind snake, the printing and textile industry generally uses ion bars. According to the discharge method, there are AC static eliminator and DC static eliminator. As far as fans are concerned, basically large foreign semiconductor manufacturers choose DC-type static eliminators, why? This is determined by their different technical characteristics.
In addition, the AC fan has a brush function. Although this is a very user-friendly design, it should not be used in the purification room, otherwise it will cause secondary pollution. The DC fan needs to be cleaned with special tools such as cotton swabs for maintenance. Sometimes customers also ask: "I bought a DC-type static eliminator. The machine is very good at the beginning, and it will change after a while. Why?" It is because the tip of the discharge electrode is on For the purpose of carbon deposition, dust collection and loss, whether the static eliminator is AC or DC, it is necessary to clean the needle tip after using it for a period of time. Maintenance work is very important, and the maintenance of the machine has a long service life. The service life of machines with poor maintenance will be shortened.
All in all, when choosing a static eliminator, stable performance, reasonable price, convenient after-sales service, and rationality of the design plan are all issues that customers should consider.
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